Title :
Micro valves using nanoparticle-based giant electrorheological fluid
Author :
Niu, Xize ; Wen, Weijia ; Lee, Yi-Kuen
Author_Institution :
Dept. of Mech. Eng., Hong Kong Univ. of Sci. & Technol., China
Abstract :
The paper presents novel micro valves, using giant electrorheological (GER) fluid, for micro flow control. This GER fluid, consisting of urea-coated 20 nm-diameter nanoparticles (barium titanyl oxalate) suspended in silicone oil, can reach a yield stress of 130 kPa, breaking the theoretical upper bound of conventional ER fluids. A PDMS-based chip was used to assure good bonding and zero dead volume of the valve in controlling the other flows. The differential pressure along the 2-way GER valve (GER channel) was systematically measured by adjusting different parameters; it is much higher than that of the present ER valves. These valves can be integrated with other microfluidic components for different applications, such as micromixing, micro-pumping and so on.
Keywords :
barium compounds; electrorheology; flow control; microfluidics; micromachining; microvalves; nanoparticles; silicones; yield stress; 130 kPa; 20 nm; barium titanyl oxalate nanoparticles; differential pressure; giant electrorheological fluid; micro flow control; microfluidic components; micromixing; micropumping; microvalves; silicone oil; smart material; urea-coated nanoparticles; yield stress; Barium; Bonding; Erbium; Fluid flow control; Microvalves; Nanoparticles; Petroleum; Stress; Upper bound; Valves;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496501