• DocumentCode
    1720626
  • Title

    Foxtail actuators

  • Author

    Mita, Makoto ; Kakushima, Kuniyuki ; Ataka, Manabu ; Toshiyoshi, Hiroshi ; Fujita, Hiroyuki

  • Author_Institution
    Inst. of Space & Astronaut. Sci., Japan Aerosp. Exploration Agency, Japan
  • Volume
    1
  • fYear
    2005
  • Firstpage
    680
  • Abstract
    We have successfully developed a novel electrostatic actuator by the silicon bulk micromachined MEMS device that looks like a "foxtail." The hairs of the actuator push the driving electrode to generate driving force. The generated thrust force of foxtail like actuator has found to be larger than 60 micronewtons.
  • Keywords
    electrostatic actuators; micromachining; silicon; driving electrode; driving force; electrostatic actuator; foxtail actuators; silicon bulk micromachined MEMS device; thrust force; Aerospace industry; Electrodes; Electrostatic actuators; Etching; Fabrication; Force sensors; Hair; Microelectromechanical devices; Optical sensors; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
  • Print_ISBN
    0-7803-8994-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2005.1496508
  • Filename
    1496508
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1720626