Title :
Foxtail actuators
Author :
Mita, Makoto ; Kakushima, Kuniyuki ; Ataka, Manabu ; Toshiyoshi, Hiroshi ; Fujita, Hiroyuki
Author_Institution :
Inst. of Space & Astronaut. Sci., Japan Aerosp. Exploration Agency, Japan
Abstract :
We have successfully developed a novel electrostatic actuator by the silicon bulk micromachined MEMS device that looks like a "foxtail." The hairs of the actuator push the driving electrode to generate driving force. The generated thrust force of foxtail like actuator has found to be larger than 60 micronewtons.
Keywords :
electrostatic actuators; micromachining; silicon; driving electrode; driving force; electrostatic actuator; foxtail actuators; silicon bulk micromachined MEMS device; thrust force; Aerospace industry; Electrodes; Electrostatic actuators; Etching; Fabrication; Force sensors; Hair; Microelectromechanical devices; Optical sensors; Silicon;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496508
