2-D scanning mirror using plastically deformed angular vertical comb drive actuator

Author

Kim, Jongbaeg ; Christensen, Dane ; Lin, Liwei

Author_Institution

Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA

Volume

1

fYear

2005

Firstpage

697

Abstract

We have demonstrated microfabricated, monolithic two degrees of freedom (2D) electrostatic torsional mirrors using a 3-mask process on SOI wafer with a single plastic deformation step. The mirror operated independently in two orthogonal directions as controlled by two sets of self-aligned angular vertical combs. The measured dynamic performance showed resonant frequencies of 10.56 kHz and 1.54 kHz with optical scanning angles up to 27 degrees and 20 degrees in the two orthogonal axes respectively, under driving voltages of 20V_dc plus 15V_pp. A reliability test of 90-day continuous mirror operation that corresponds to peak resonance of 80- and 12.1-billion cycles on the two orthogonal axes showed negligible performance variations.

Keywords

electrostatic actuators; electrostatic devices; micromirrors; plastic deformation; silicon-on-insulator; 1.54 kHz; 10.56 kHz; 15 V; 20 V; 2D scanning mirror; 3-mask process; SOI wafer; angular vertical comb drive actuator; dynamic performance; microfabricated electrostatic torsional mirrors; monolithic two degrees of freedom mirrors; plastic deformation; plastically deformed comb drive actuator; Assembly; Bars; Couplings; Electrostatic actuators; Etching; Micromirrors; Mirrors; Optical device fabrication; Optical sensors; Plastics;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496512

Filename

1496512