Alternative fabrication methods for capillary electrophoretic device manufacturing

Author

Conklin, John A. ; Crain, Mark M. ; Pai, Rekha S. ; Martin, M. ; Pitts, K. ; Roussel, Thomas J. ; Jackson, Doug J. ; Baldwin, Richard P. ; Keynton, Robert S. ; Naber, John F. ; Walsh, Kevin M.

Author_Institution

Dept. of Electr. Eng., Louisville Univ., KY, USA

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

83

Lastpage

85

Abstract

This work represents research that explores the development of novel manufacturing methods to create microcapillary electrophoretic (CE) devices. Nontraditional substrates that were investigated include polymers such as SU-8, poly dimethylsiloxane (PDMS), acetate, Riston, Kapton, polyimide, and polyester. Hot embossing, chemical etching, micro-molding, wafer level bonding, chemical treatment, and lamination techniques were developed for these substrates. The purpose of this paper is to explore the feasibility of micromachining a select group of alternative materials

Keywords

capillarity; electrophoresis; etching; laminates; microfluidics; micromachining; moulding; polymers; surface treatment; wafer bonding; Kapton; PDMS; Riston; SU-8; acetate; capillary electrophoretic device manufacturing; chemical etching; chemical treatment; fabrication methods; hot embossing; lamination techniques; manufacturing method development; micro-molding; microcapillary electrophoretic devices; micromachining; poly dimethylsiloxane; polyester; polyimide; polymer substrates; wafer level bonding; Chemicals; Embossing; Etching; Fabrication; Lamination; Manufacturing; Micromachining; Polyimides; Polymers; Wafer bonding;

fLanguage

English

Publisher

ieee

Conference_Titel

University/Government/Industry Microelectronics Symposium, 2001. Proceedings of the Fourteenth Biennial

Conference_Location

Richmond, VA

ISSN

0749-6877

Print_ISBN

0-7803-6691-3

Type

conf

DOI

10.1109/UGIM.2001.960299

Filename

960299