A membrane actuator based on piezo-polymer-composite technology [microvalve application example]

Author

Just, Elmar ; Pustan, David ; Woias, Peter

Author_Institution

IMTEK, Albert-Ludwigs-Univ., Freiburg, Germany

Volume

1

fYear

2005

Firstpage

753

Abstract

This paper presents the design, fabrication and characterization of a novel piezo-polymer-composite membrane actuator. Based on this membrane actuator, a valve for liquids and gases is presented as an application example. In measurements with water, the functionality of the valve was demonstrated for a pressure up to 650 hPa with a maximum flow of 1.5 l/h and a leak rate of less than 4 ml/h in the closed state. Moreover, a novel low-cost fabrication technology was developed that combines laser micromachining and polymer insert casting.

Keywords

casting; membranes; microactuators; microfluidics; micromachining; micropumps; microvalves; piezoelectric actuators; polymers; 650 hPa; closed state leak rate; gas valve; laser micromachining; liquid valve; low-cost fabrication technology; maximum flow; membrane actuator; micropumps; microvalve; piezo-polymer-composite; piezoelectric actuator; polymer insert casting; Actuators; Biomembranes; Fluid flow measurement; Gases; Liquids; Micromachining; Microvalves; Optical device fabrication; Pressure measurement; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496526

Filename

1496526