Title :
An integrated microstructure with temperature control for gas sensors
Author :
Cardinali, G.C. ; Dori, L. ; Fiorini, M. ; Maccagnani, P. ; Liberali, V.
Author_Institution :
Istituto LAMEL, CNR, Bologna, Italy
Abstract :
This paper describes an integrated microstructure used to control temperature in a gas sensor system. An innovative technological approach has been pursued to integrate gas sensors on silicon substrate, compatible with IC fabrication. A mixed analog-digital electronic interface controls temperature operation, to maximize the sensitivity to substances to be detected
Keywords :
gas sensors; mechanical stability; membranes; temperature control; IC fabrication compatibility; Si; Si substrate; gas sensors; integrated microstructure; mixed analog-digital electronic interface; temperature control; Biomembranes; Chemical sensors; Consumer electronics; Fabrication; Gas detectors; Microstructure; Silicon; Substrates; Temperature control; Temperature sensors;
Conference_Titel :
Microelectronics, 1997. Proceedings., 1997 21st International Conference on
Conference_Location :
Nis
Print_ISBN :
0-7803-3664-X
DOI :
10.1109/ICMEL.1997.632891
