DocumentCode
1721208
Title
An integrated microstructure with temperature control for gas sensors
Author
Cardinali, G.C. ; Dori, L. ; Fiorini, M. ; Maccagnani, P. ; Liberali, V.
Author_Institution
Istituto LAMEL, CNR, Bologna, Italy
Volume
2
fYear
1997
Firstpage
515
Abstract
This paper describes an integrated microstructure used to control temperature in a gas sensor system. An innovative technological approach has been pursued to integrate gas sensors on silicon substrate, compatible with IC fabrication. A mixed analog-digital electronic interface controls temperature operation, to maximize the sensitivity to substances to be detected
Keywords
gas sensors; mechanical stability; membranes; temperature control; IC fabrication compatibility; Si; Si substrate; gas sensors; integrated microstructure; mixed analog-digital electronic interface; temperature control; Biomembranes; Chemical sensors; Consumer electronics; Fabrication; Gas detectors; Microstructure; Silicon; Substrates; Temperature control; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics, 1997. Proceedings., 1997 21st International Conference on
Conference_Location
Nis
Print_ISBN
0-7803-3664-X
Type
conf
DOI
10.1109/ICMEL.1997.632891
Filename
632891
Link To Document