DocumentCode
1721280
Title
Technology for monolithic integration of ridge-guided quantum well lasers and AlGaAs/GaAs/AlGaAs-HEMT electronics
Author
Bronner, W. ; Hornung, J. ; Köhler, K. ; Benz, W. ; Olander, E. ; Ralston, J.D.
Author_Institution
Fraunhofer-Institut fur Angewandte Festkorperphysik
fYear
1994
fDate
6/16/1905 12:00:00 AM
Firstpage
19
Lastpage
20
Keywords
Diode lasers; Dry etching; Gallium arsenide; HEMTs; Laser modes; Lithography; Mirrors; Monolithic integrated circuits; Quantum well lasers; Wet etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 1994. 52nd Annual
Type
conf
DOI
10.1109/DRC.1994.1009398
Filename
1009398
Link To Document