Title :
Technology for monolithic integration of ridge-guided quantum well lasers and AlGaAs/GaAs/AlGaAs-HEMT electronics
Author :
Bronner, W. ; Hornung, J. ; Köhler, K. ; Benz, W. ; Olander, E. ; Ralston, J.D.
Author_Institution :
Fraunhofer-Institut fur Angewandte Festkorperphysik
fDate :
6/16/1905 12:00:00 AM
Keywords :
Diode lasers; Dry etching; Gallium arsenide; HEMTs; Laser modes; Lithography; Mirrors; Monolithic integrated circuits; Quantum well lasers; Wet etching;
Conference_Titel :
Device Research Conference, 1994. 52nd Annual
DOI :
10.1109/DRC.1994.1009398