Triple implanted bipolar junction transistor

This paper describes a senior design project in Electrical Engineering at Virginia Commonwealth University (VCU) aimed at the fabrication of isolated bipolar devices at VCU. The primary deliverable output of this project will be web-based documentation, mask layout, process flow, and device characterization techniques for future VLSI fabrication labs. All areas of the design process, simulation and electrical testing are to be fully documented. Cross sections and layout views for all test chip cells are also fully documented to explain the functionality and reason for the inclusion of that cell. All reference materials used, and links to various sites are available