• DocumentCode
    1722345
  • Title

    Self-assembled silicon networks on plastic

  • Author

    Stauth, Sean A. ; Parviz, Babak A.

  • Author_Institution
    Dept. of Electr. Eng., Univ. of Washington, Seattle, WA, USA
  • Volume
    1
  • fYear
    2005
  • Firstpage
    964
  • Abstract
    We demonstrate the use of self-assembly for low temperature integration of microfabricated silicon components on a plastic substrate. Our method allows for integration of parts made by incompatible microfabrication technologies into a single platform. The self-assembly is performed in a single step providing both mechanical and electrical connections. The mild self-assembly conditions (temperature <100 C, pH ∼3.5) are compatible with most electronics and photonics components.
  • Keywords
    microassembling; micromachining; plastics; self-assembly; semiconductor devices; silicon; substrates; electronics components; fluidic self-assembly; incompatible microfabrication technologies; low temperature integration; microfabricated silicon components; mild self-assembly conditions; photonics components; plastic substrate; self-assembled silicon networks; Amorphous silicon; Assembly; Electron mobility; Gravity; Organic light emitting diodes; Plastics; Self-assembly; Shape; Substrates; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
  • Print_ISBN
    0-7803-8994-8
  • Type

    conf

  • DOI
    10.1109/SENSOR.2005.1496615
  • Filename
    1496615