DocumentCode
1722345
Title
Self-assembled silicon networks on plastic
Author
Stauth, Sean A. ; Parviz, Babak A.
Author_Institution
Dept. of Electr. Eng., Univ. of Washington, Seattle, WA, USA
Volume
1
fYear
2005
Firstpage
964
Abstract
We demonstrate the use of self-assembly for low temperature integration of microfabricated silicon components on a plastic substrate. Our method allows for integration of parts made by incompatible microfabrication technologies into a single platform. The self-assembly is performed in a single step providing both mechanical and electrical connections. The mild self-assembly conditions (temperature <100 C, pH ∼3.5) are compatible with most electronics and photonics components.
Keywords
microassembling; micromachining; plastics; self-assembly; semiconductor devices; silicon; substrates; electronics components; fluidic self-assembly; incompatible microfabrication technologies; low temperature integration; microfabricated silicon components; mild self-assembly conditions; photonics components; plastic substrate; self-assembled silicon networks; Amorphous silicon; Assembly; Electron mobility; Gravity; Organic light emitting diodes; Plastics; Self-assembly; Shape; Substrates; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN
0-7803-8994-8
Type
conf
DOI
10.1109/SENSOR.2005.1496615
Filename
1496615
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