Title :
Low-insertion-loss compact 3D-MEMS optical matrix switch with 18 input/output ports
Author :
Kazama, Atsushi ; Itou, Yasuhixo ; Horino, Masaya ; Fukuda, Kazuyuki ; Kanamaru, Masatoshi ; Akashi, Teruhisa ; Ishikawa, Tadaaki ; Harada, Takeshi ; Okada, Ryoji
Author_Institution :
Mech. Eng. Res. Lab., Hitachi Ltd., Japan
Abstract :
The paper describes a new three-dimensional (3D) MEMS optical switch. The switch consists of a collimator array for generating optical beams, and a MEMS mirror array for changing the directions of the beams. Each of the 18 optical ports can be either an input or an output, giving the switch a flexible configuration of 8×8, 2×16, and so on. The mirrors and the collimators are assembled passively in a compact package measuring 80×30×12 mm3. The mean of measured insertion losses of all 64 paths in an 8×8 switch configuration was 1.1 dB; this confirms the low insertion loss of the developed switch.
Keywords :
electrostatic actuators; micromachining; micromirrors; optical communication equipment; optical switches; 1.1 dB; 12 mm; 30 mm; 80 mm; MEMS mirror array; MEMS mirror design; bulk micromachining; collimator array; compact 3D-MEMS optical matrix switch; electrostatic mirror; low insertion loss optical switch; optical beam generation; optical network systems; Assembly; Insertion loss; Loss measurement; Micromechanical devices; Mirrors; Optical arrays; Optical beams; Optical collimators; Optical switches; Packaging;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496617
