Title :
Fishbone-shaped vertical comb actuator for dual-axis 1D analog micromirror array
Author :
Kouma, Norinao ; Tsuboi, Osamu ; Soneda, Hiromitsu ; Ueda, Satosh ; Sawaki, Ippei
Author_Institution :
Peripheral Syst. Labs., Fujitsu Labs. Ltd, Akashi, Japan
Abstract :
We have developed a bulk-micromirror with a high fill-factor using a simple process. By using an asymmetrical mirror structure, a newly designed "fishbone-shaped" vertical comb actuator, and a new mirror frame that enables a narrow pitch, we developed a dual-axis micromirror array with the narrow pitch of 250 microns and high fill-factor of 80%. The fabricated micromirror provides a large rotation angle, for example, 6° for the X axis and 2° at 200 V for the Y axis. The resonance frequencies for both axes are approximately 3 kHz.
Keywords :
microactuators; micromachining; micromirrors; optical communication equipment; 200 V; 250 micron; WDM devices; asymmetrical mirror structure; bulk-micromachining technology; bulk-micromirror; dual-axis 1D analog micromirror array; dual-axis micromirror array; fishbone-shaped vertical comb actuator; mirror frame; narrow pitch; resonance frequencies; rotation angle; schematic design; Actuators; Bars; Laboratories; Micromirrors; Mirrors; Optical devices; Optical surface waves; Rough surfaces; Surface roughness; Teeth;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496619
