Fishbone-shaped vertical comb actuator for dual-axis 1D analog micromirror array

Author

Kouma, Norinao ; Tsuboi, Osamu ; Soneda, Hiromitsu ; Ueda, Satosh ; Sawaki, Ippei

Author_Institution

Peripheral Syst. Labs., Fujitsu Labs. Ltd, Akashi, Japan

Volume

1

fYear

2005

Firstpage

980

Abstract

We have developed a bulk-micromirror with a high fill-factor using a simple process. By using an asymmetrical mirror structure, a newly designed "fishbone-shaped" vertical comb actuator, and a new mirror frame that enables a narrow pitch, we developed a dual-axis micromirror array with the narrow pitch of 250 microns and high fill-factor of 80%. The fabricated micromirror provides a large rotation angle, for example, 6° for the X axis and 2° at 200 V for the Y axis. The resonance frequencies for both axes are approximately 3 kHz.

Keywords

microactuators; micromachining; micromirrors; optical communication equipment; 200 V; 250 micron; WDM devices; asymmetrical mirror structure; bulk-micromachining technology; bulk-micromirror; dual-axis 1D analog micromirror array; dual-axis micromirror array; fishbone-shaped vertical comb actuator; mirror frame; narrow pitch; resonance frequencies; rotation angle; schematic design; Actuators; Bars; Laboratories; Micromirrors; Mirrors; Optical devices; Optical surface waves; Rough surfaces; Surface roughness; Teeth;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496619

Filename

1496619