• DocumentCode
    1722474
  • Title

    Application of phase-shifting mask technology to 0.17μm-gate GaAs MESFET for ultra high speed IC´s

  • Author

    Ohshima, T. ; Yamamoto, N. ; Ichioka, T. ; Kimura, T. ; Sano, Y.

  • Author_Institution
    Oki Electric Industry Co. Ltd.
  • fYear
    1994
  • fDate
    6/16/1905 12:00:00 AM
  • Firstpage
    143
  • Lastpage
    144
  • Keywords
    Application specific integrated circuits; Gallium arsenide; High speed integrated circuits; MESFET integrated circuits; Photonic integrated circuits; Power dissipation; Propagation delay; Resists; Threshold voltage; Transconductance;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference, 1994. 52nd Annual
  • Type

    conf

  • DOI
    10.1109/DRC.1994.1009448
  • Filename
    1009448
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1722474