Title :
An electrothermal SCS micromirror for large bidirectional 2D scanning
Author :
Jain, Ankur ; Xie, Huikai
Author_Institution :
Dept. of Electr. & Comput. Eng., Florida Univ., Gainesville, FL, USA
Abstract :
The paper reports the design, fabrication and operation of a two-dimensional (2D) micromirror that can generate large bidirectional scans at low actuation voltages. The micromirror device has been fabricated using a unique DRIE CMOS-MEMS process that can simultaneously provide thin-film and single-crystal silicon microstructures. A fabricated micromirror has negligible initial tilt angle, and can perform large bidirectional 2D optical scans (over ±30°) at less than 12 Vdc. 2D scanning using this mirror has been demonstrated by obtaining a 14° by 50° angular raster scan pattern.
Keywords :
microactuators; micromachining; micromirrors; optical scanners; semiconductor thin films; silicon; sputter etching; DRIE CMOS-MEMS process; Si; actuation voltage; bidirectional 2D scanning; electrothermal micromirror; initial tilt angle; optical scanning; raster scan pattern; single-crystal-silicon micromirror; thin-film silicon microstructures; Actuators; Bidirectional control; Biomedical optical imaging; Electrothermal effects; Low voltage; Micromirrors; Mirrors; Optical sensors; Silicon; Two dimensional displays;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on
Print_ISBN :
0-7803-8994-8
DOI :
10.1109/SENSOR.2005.1496621
