DocumentCode
1722747
Title
Very low resistance non-alloyed ohmic contacts using as-rich GaAs
Author
Patkar, M.P. ; Chin, T.P. ; Woodall, J.M. ; Lundstrom, M.S. ; Melloch, M.R.
Author_Institution
Purdue University
fYear
1994
fDate
6/16/1905 12:00:00 AM
Firstpage
182
Lastpage
184
Keywords
Annealing; Contact resistance; Doping; Gallium arsenide; Molecular beam epitaxial growth; Ohmic contacts; Protection; Space charge; Temperature; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 1994. 52nd Annual
Type
conf
DOI
10.1109/DRC.1994.1009459
Filename
1009459
Link To Document