A 2-D translational pinhole formed by two orthogonally moving micro-slits

Author

Chronis, N. ; Okandan, M. ; Bake, M. ; Lee, L.P.

Author_Institution

Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA

Volume

1

fYear

2005

Firstpage

1022

Abstract

Pinhole alignment is a tedious procedure that strongly affects the overall performance of an optical system. In order to address this critical issue, we developed a 2D translational pinhole, which is formed by two orthogonally moving micro-slits. The MEMS pinhole, fabricated by a modified SUMMIT-V process, can be positioned within a range of 30×30 microns in the XY plane. Alternatively, it can be used in a scanning mode at driving frequencies up to ∼200Hz without any noticeable amplitude decrease. Typical applications include confocal scanning opthalmoscopes, laser beam profilers, and MEMS confocal microscopes.

Keywords

micro-optics; microactuators; 2D translational pinhole; MEMS pinhole; confocal microscopes; confocal scanning opthalmoscopes; laser beam profilers; modified SUMMIT-V process; orthogonally moving micro-slits; pinhole alignment; scanning mode; Actuators; Biomembranes; Electrothermal effects; Laser beams; Micromechanical devices; Optical devices; Optical microscopy; Optical sensors; Scanning electron microscopy; Stacking;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on

Print_ISBN

0-7803-8994-8

Type

conf

DOI

10.1109/SENSOR.2005.1496629

Filename

1496629