DocumentCode
1723600
Title
Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
fYear
1994
Keywords
fluidics; microactuators; microassembling; micromechanical devices; micropumps; microsensors; robots; actuators; buckling; damping; etching; fabrication methods; fluidics; materials; micro robotics; micro-fluid handling; microassembly; microelectromechanical systems; modeling; sensors; teleoperation;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location
Oiso, Japan
Print_ISBN
0-7803-1833-1
Type
conf
DOI
10.1109/MEMSYS.1994.555586
Filename
555586
Link To Document