Title :
Fabrication of actuators using magnetostrictive thin films
Author :
Honda, T. ; Arai, K.I. ; Yamaguchi, M.
Author_Institution :
Res. Inst. of Electr. Commun., Tohoku Univ., Sendai, Japan
fDate :
6/16/1905 12:00:00 AM
Abstract :
A new concept of the microactuation driven by magnetostriction is proposed. We fabricated two kinds of cantilever actuators and a travelling machine, composed of the magnetostrictive thin films on a polyimide film. Amorphous Tb-Fe and Sm-Fe thin films were used as the magnetostrictive materials. These actuators moved without power supply cable and the cantilever actuators exhibited the large deflection in low magnetic fields. Such unique characteristics suggest that the magnetostriction is suitable for the driving force of the microactuator
Keywords :
amorphous magnetic materials; ferromagnetic materials; iron alloys; magnetic thin film devices; magnetostrictive devices; microactuators; samarium alloys; terbium alloys; Sm-Fe thin films; SmFe; Tb-Fe thin films; TbFe; cantilever actuators; deflection; driving force; magnetostrictive thin films; microactuation; polyimide film; travelling machine; Actuators; Amorphous magnetic materials; Amorphous materials; Fabrication; Magnetic films; Magnetic materials; Magnetostriction; Polyimides; Power supplies; Transistors;
Conference_Titel :
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location :
Oiso
Print_ISBN :
0-7803-1833-1
DOI :
10.1109/MEMSYS.1994.555597
