Surface micromachined magnetic actuators

Author

Liu, Chang ; Tsao, Tom ; Tai, Yu-Chong ; Ho, Chih-Ming

Author_Institution

Dept. of Electr. Eng., California Inst. of Technol., Pasadena, CA, USA

fYear

1994

fDate

6/16/1905 12:00:00 AM

Firstpage

57

Lastpage

62

Abstract

A surface micromachined micromagnetic actuator (also called a magnetic flap) as an integrated part of an active micro electromechanical fluid control system is described. The flaps are fabricated by surface micromachining technology and are capable of achieving large deflections (above 100 μm) with magnetic forces in stationary air. Special microfabrication issues involved in fabricating magnetic flaps with large areas are discussed. Mechanical characterizations of the flaps, including the intrinsic stresses of thin film materials and frequency response, are presented. Thermal actuation is capable of producing large flap displacements and has been theoretically and experimentally studied

Keywords

coils; flow control; frequency response; magnetic thin film devices; microactuators; micromachining; 100 micron; active micro electro-mechanical fluid control system; deflections; flap displacements; frequency response; intrinsic stresses; magnetic actuators; magnetic flap; microfabrication issues; surface micromachining; thermal actuation; Actuators; Control systems; Frequency response; Magnetic forces; Magnetic liquids; Magnetic materials; Micromachining; Micromagnetics; Thermal stresses; Transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on

Conference_Location

Oiso

Print_ISBN

0-7803-1833-1

Type

conf

DOI

10.1109/MEMSYS.1994.555598

Filename

555598