A concentric build-up process to fabricate practical wobble motors

For practical applications of wobble motors to MEMS, we have developed a new fabrication technique. This technique is based on assembly-free process and can produce wobble motors with both sufficient mechanical strength and appropriate interface to other devices. This new process features the concentric build-up of layers around a cylindrical substrate and three dimensional bulk structures can be easily produced by microfabrication methods. In this paper, we present the details of this novel fabrication technique and show the experimental results of the fabricated wobble motors