Title :
Parametric composite limited yield index for functional circuits yield prediction
Author :
Liao, Jiun-Hsin ; Ahsan, Ishtiaq ; Logan, Ronald ; Rudgers, George ; Towler, Fred
Author_Institution :
Semicond. R&D Center, IBM, Hopewell Junction, NY, USA
Abstract :
In this paper we present an early detection mechanism for semiconductor circuit yield prediction and tracking. Several discrete devices used as components of functional circuits have been examined by their first-metal level test data and correlated to the higher metal level functional yield. A concept of Device Health Composite Yield is also introduced in this paper.
Keywords :
condition monitoring; fault diagnosis; integrated circuit yield; semiconductor device manufacture; device health composite yield; discrete devices; early detection mechanism; functional circuit yield prediction; parametric composite limited yield index; semiconductor circuit yield prediction; Arrays; Correlation; Indexes; Leakage current; Logic gates; Metals; Random access memory; Parametric limited yield; Yield prediction;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI
Conference_Location :
Saratoga Springs, NY
Print_ISBN :
978-1-61284-408-4
Electronic_ISBN :
1078-8743
DOI :
10.1109/ASMC.2011.5898160