Title :
Integration of MEMS with a SoC in a microrobot
Author :
Truong, Olivier-Don ; Kaou, Neila ; Martel, Sylvain
Author_Institution :
Departement de Genie Informatique, Ecole Polytechnique de Montreal, Que., Canada
Abstract :
This article presents an integration technique for electrostatic motors with a SoC-type microelectronic circuit for design of a miniature robot of size 3 mm × 3 mm × 3 mm. More precisely, a technique of assembling the parts of a microrobot with the aid of a mould and a compact interconnection technique integrable on a three dimensional structure with the aid of microfabrication techniques.
Keywords :
electrostatic motors; microassembling; micromechanical devices; microrobots; system-on-chip; MEMS; SoC; compact interconnection technique; electrostatic motors; microelectromechanical systems; microfabrication techniques; microrobot; system-on-chip; three dimensional structure; Circuits; Content addressable storage; Legged locomotion; Mechanical systems; Micromechanical devices; Microscopy; Plasmas; Robots; System-on-a-chip; Tunneling;
Conference_Titel :
IEEE-NEWCAS Conference, 2005. The 3rd International
Print_ISBN :
0-7803-8934-4
DOI :
10.1109/NEWCAS.2005.1496712
