• DocumentCode
    1725006
  • Title

    On integrated CMOS-MEMS system-on-chip

  • Author

    Ghosh, Soumik ; Bayoumi, Magdy

  • Author_Institution
    Center for Adv. Comput. Studies, Louisiana Univ., Lafayette, LA, USA
  • fYear
    2005
  • Firstpage
    31
  • Lastpage
    34
  • Abstract
    The paper reviews the state-of-the-art in the field of CMOS-based microelectromechanical systems (MEMS). The different CMOS MEMS fabrication approaches, pre-CMOS, intermediate-CMOS, and post-CMOS, are summarized and examples are given.
  • Keywords
    CMOS integrated circuits; micromechanical devices; system-on-chip; CMOS-MEMS system-on-chip; CMOS-based microelectromechanical system; Annealing; CMOS process; CMOS technology; Circuits; Fabrication; Microelectromechanical systems; Micromachining; Micromechanical devices; Microstructure; System-on-a-chip;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    IEEE-NEWCAS Conference, 2005. The 3rd International
  • Print_ISBN
    0-7803-8934-4
  • Type

    conf

  • DOI
    10.1109/NEWCAS.2005.1496726
  • Filename
    1496726
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1725006