Title :
On integrated CMOS-MEMS system-on-chip
Author :
Ghosh, Soumik ; Bayoumi, Magdy
Author_Institution :
Center for Adv. Comput. Studies, Louisiana Univ., Lafayette, LA, USA
Abstract :
The paper reviews the state-of-the-art in the field of CMOS-based microelectromechanical systems (MEMS). The different CMOS MEMS fabrication approaches, pre-CMOS, intermediate-CMOS, and post-CMOS, are summarized and examples are given.
Keywords :
CMOS integrated circuits; micromechanical devices; system-on-chip; CMOS-MEMS system-on-chip; CMOS-based microelectromechanical system; Annealing; CMOS process; CMOS technology; Circuits; Fabrication; Microelectromechanical systems; Micromachining; Micromechanical devices; Microstructure; System-on-a-chip;
Conference_Titel :
IEEE-NEWCAS Conference, 2005. The 3rd International
Print_ISBN :
0-7803-8934-4
DOI :
10.1109/NEWCAS.2005.1496726
