Title :
Simple microflight mechanism on silicon wafer
Author :
Shimoyama, Isao ; Kubo, Yayoi ; Kaneda, Tomoyuki ; Miura, Hirofumi
Author_Institution :
Dept. of Mech. Eng., Tokyo Univ., Japan
fDate :
6/16/1905 12:00:00 AM
Abstract :
Flying is an advantageous method of mobility for a microscale machine due to the scale effect. Insects have evolved through natural selection, so they have fascinating structures and functions which are good models for a micromachine, especially in regard to microflight. A flying micromechanism is discussed, including its structure, actuators, power supply, and dynamics. One such 3D flying mechanism microstructure has been made
Keywords :
micromechanical devices; 3D flying mechanism microstructure; Si; Si wafer; actuators; dynamics; flying micromechanism; microflight mechanism; micromachine; microscale machine; mobility; models; power supply; Actuators; Frequency; Insects; Mobile robots; Muscles; Organisms; Resonance; Robot sensing systems; Silicon; Wheels;
Conference_Titel :
Micro Electro Mechanical Systems, 1994, MEMS '94, Proceedings, IEEE Workshop on
Conference_Location :
Oiso
Print_ISBN :
0-7803-1833-1
DOI :
10.1109/MEMSYS.1994.555614
