DocumentCode
1725347
Title
Data mining using PLS-trees and other projection methods
Author
Byrne, Tamara ; Wold, Svante
Author_Institution
MKS Instrum., Umetrics, Inc., San Jose, CA, USA
fYear
2011
Firstpage
1
Lastpage
5
Abstract
The amount of data measured during a typical manufacturing process is immense. To efficiently utilize these data without becoming overwhelmed with confusing and often conflicting information is difficult to impossible when using traditional univariate methods. Multivariate data mining methods can be used to examine large data sets by extracting relationships between variables to highlight variable correlations and deviations. Specifically, PLS-trees can be used to quickly identify significant clusters in large datasets and to highlight the differences within the groups.
Keywords
data mining; tree data structures; PLS trees; data mining; manufacturing process; Data mining; Data models; Predictive models; Principal component analysis; Process control; Semiconductor device modeling; Semiconductor process modeling; Cluster analysis; PCA; PLS; multivariate; time series data;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI
Conference_Location
Saratoga Springs, NY
ISSN
1078-8743
Print_ISBN
978-1-61284-408-4
Electronic_ISBN
1078-8743
Type
conf
DOI
10.1109/ASMC.2011.5898193
Filename
5898193
Link To Document