• DocumentCode
    1725347
  • Title

    Data mining using PLS-trees and other projection methods

  • Author

    Byrne, Tamara ; Wold, Svante

  • Author_Institution
    MKS Instrum., Umetrics, Inc., San Jose, CA, USA
  • fYear
    2011
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    The amount of data measured during a typical manufacturing process is immense. To efficiently utilize these data without becoming overwhelmed with confusing and often conflicting information is difficult to impossible when using traditional univariate methods. Multivariate data mining methods can be used to examine large data sets by extracting relationships between variables to highlight variable correlations and deviations. Specifically, PLS-trees can be used to quickly identify significant clusters in large datasets and to highlight the differences within the groups.
  • Keywords
    data mining; tree data structures; PLS trees; data mining; manufacturing process; Data mining; Data models; Predictive models; Principal component analysis; Process control; Semiconductor device modeling; Semiconductor process modeling; Cluster analysis; PCA; PLS; multivariate; time series data;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference (ASMC), 2011 22nd Annual IEEE/SEMI
  • Conference_Location
    Saratoga Springs, NY
  • ISSN
    1078-8743
  • Print_ISBN
    978-1-61284-408-4
  • Electronic_ISBN
    1078-8743
  • Type

    conf

  • DOI
    10.1109/ASMC.2011.5898193
  • Filename
    5898193