DocumentCode

1725383

Title

Development of polysilicon TFTs for 16 MB SRAMs and beyond

Author

Batra, S. ; Maddox, R. ; Tran, L. ; Manning, M. ; Dennison, C. ; Fazan, P.

Author_Institution

Micron Semiconductor, Inc.

fYear

1993

fDate

6/15/1905 12:00:00 AM

Firstpage

97

Lastpage

98

Keywords

Crystallization; Degradation; Dielectrics; Grain size; Implants; Microstructure; Random access memory; Solids; Stability; Thin film transistors;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 1993. 51st Annual

Type

conf

DOI

10.1109/DRC.1993.1009597

Filename

1009597