DocumentCode
1725401
Title
A 0.5-μm EEPROM cell using poly-si TFT technology
Author
Sato, A. ; Momiyama, Y. ; Nara, Y. ; Sugii, T. ; Arimoto, Y. ; Ito, T.
Author_Institution
Fujitsu Laboratory LTD.
fYear
1993
fDate
6/15/1905 12:00:00 AM
Firstpage
99
Lastpage
100
Keywords
EPROM; Insulation; Ion implantation; MOSFETs; Nonvolatile memory; Oxidation; Semiconductor films; Thin film transistors; Threshold voltage; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Device Research Conference, 1993. 51st Annual
Type
conf
DOI
10.1109/DRC.1993.1009598
Filename
1009598
Link To Document