A 3-D sidewall flash EPROM cell and memory array

Author

Pein, Howard ; Plummer, James D.

Author_Institution

Center for Integrated Systems, Stanford University

fYear

1993

fDate

6/15/1905 12:00:00 AM

Firstpage

101

Lastpage

102

Keywords

Circuits; EPROM; Etching; Geometry; Nonvolatile memory; Secondary generated hot electron injection; Silicon; Threshold voltage; Transistors; Wire;

fLanguage

English

Publisher

ieee

Conference_Titel

Device Research Conference, 1993. 51st Annual

Type

DOI

10.1109/DRC.1993.1009599

Filename

1009599

Link To Document