The Deployment Page: Integrated real time views of tools, operations, and lots: ASMC 2011 data management

Running a semiconductor manufacturing facility with a large product portfolio creates unique challenges for knowledge management. Complex process controls, tool configurations, and wide ranges of roles and responsibility can quickly lead to increasing information technology (IT) support requirements with decreasing effectiveness. The IBM Burlington 200mm manufacturing facility has successfully met some of these challenges with an effective and efficient knowledge management system known simply as “The Deployment Page” (TDP). Through integration of key pieces of information, this system has successfully built a foundation to enable standardized work for deploying resources, both people and equipment, across a wide range of roles and responsibilities. At the heart of this system is the integrated view of tools, operations and lots. This paper will cover some of the basics of TDP, its evolution in use, planned future enhancements and some examples of how it is used.