• DocumentCode
    1725905
  • Title

    Demonstration of monolithic Co-fabrication of Y1Ba2Cu3O7-δ and CMOS devices on the same sapphire substrate

  • Author

    de la Houssaye, P.R. ; Burns, M.J. ; Ruby, W.J. ; Russell, S.D. ; Clayton, S.R. ; Garcia, G.A. ; Lee, L.P.

  • Author_Institution
    Conductus, Inc.
  • fYear
    1993
  • fDate
    6/15/1905 12:00:00 AM
  • Firstpage
    148
  • Lastpage
    149
  • Keywords
    CMOS process; Fabrication; High temperature superconductors; Integrated circuit interconnections; SQUIDs; Silicon; Substrates; Superconducting devices; Superconducting films; Yttrium barium copper oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference, 1993. 51st Annual
  • Type

    conf

  • DOI
    10.1109/DRC.1993.1009619
  • Filename
    1009619
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1725905