Title :
Doping-spike LWIR PtSi schottky IR detector fabricated by molecular beam epitaxy
Author :
Lin, T.L. ; Park, J. ; George, T. ; Jones, E.W.
Author_Institution :
Center for Space Microelectronics Technology, Jet Propulsion Laboratory, California Institute of Technology
fDate :
6/15/1905 12:00:00 AM
Keywords :
Boron; Dark current; Doping; Infrared detectors; Infrared sensors; Molecular beam epitaxial growth; Schottky barriers; Sensor arrays; Space technology; Tunneling;
Conference_Titel :
Device Research Conference, 1993. 51st Annual
DOI :
10.1109/DRC.1993.1009625