Title :
Composite photopolymer microstructures: from planar to 3D devices
Author :
Renaud, P. ; Metz, S. ; Jiguet, S. ; Bertsch, A.
Author_Institution :
Microsyst. Lab., Ecole Polytech. Fed. de Lausanne, Switzerland
Abstract :
In this paper, a survey is made of some technologies in which the photo-definable polymer is used as structural material and where physical properties of polymers are modified to change porosity, mechanical or electrical properties. The paper is organized in three sections: (a) 2D, multilayer photopolymers, (b) High aspect ratio and (c) 3D micro-stereolithography technologies. In addition the authors mention some development in which photo-polymerization is used to locally create special structures.
Keywords :
composite materials; microelectrodes; multilayers; noncrystalline structure; optical polymers; polymerisation; porosity; stereolithography; composite photopolymer microstructures; electrical properties; mechanical properties; microstereolithography; multilayer photopolymers; photodefinable polymer; photopolymerization; planar devices; porosity; structural material; three-dimensional devices; Electrodes; Etching; Laboratories; Micromechanical devices; Microstructure; Polyimides; Polymers; Resists; Sensor arrays; Silicon;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1216934
