Scanning probe with elastomeric (PDMS) tip for scanning probe microcontact printing (SP-CP)

Author

Xuefeng Wang ; Kee Ryu ; Bullen, D. ; Jun Zou ; Mirkin, C. ; Chang Liu

Author_Institution

Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA

Volume

2

fYear

2003

Firstpage

1003

Abstract

This paper reports a newly developed scanning probe microcontact printing (SP-/spl mu/CP) method to generate submicron patterns. It uses a scanning probe with an elastomeric tip to transfer chemical or biological materials onto a substrate. SP-/spl mu/CP combines the advantages of microcontact printing and scanning probe microscopy technologists. The design and fabrication of the scanning probe is described in this work. The functioning of the probe is demonstrated by generation of sub-500 nm ODT lines on a gold surface using SP-/spl mu/CP method.

Keywords

elastomers; lithography; micromachining; printing; 500 nm; biological material; chemical material; elastomeric PDMS tip; gold surface; microcontact printing; scanning probe; scanning probe microcontact printing; scanning probe microscopy; Biological materials; Chemicals; Fabrication; Ink; Nanobioscience; Printing; Scanning probe microscopy; Self-assembly; Soft lithography; Solids;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1216937

Filename

1216937