Analysis of performance/variability trade-off in Macaroni-type 3-D NAND memory

Author

Congedo, G. ; Arreghini, A. ; Liu, L. ; Capogreco, E. ; Lisoni, J.G. ; Huet, Karim ; Toque-Tresonne, Ines ; Van Aerde, S. ; Toledano-Luque, Maria ; Tan, C.-L. ; Van den bosch, G. ; Van Houdt, J.

Author_Institution

Imec, Leuven, Belgium

fYear

2014

fDate

18-21 May 2014

Firstpage

1

Lastpage

4

Abstract

Full channel and Macaroni-type 3-D SONOS memories are thoroughly compared. Macaroni channel provides easier device controllability, resulting in tighter distributions of all electrical characteristics, at the expense of lower channel conduction. Next to this clear trade-off, memory window is also degraded. Improving channel material quality is the way to alleviate the trade-off, as demonstrated by Laser Thermal Anneal treatment of Macaroni channel.

Keywords

NAND circuits; storage management chips; three-dimensional integrated circuits; Macaroni-type 3D SONOS NAND memory; channel material quality; electrical characteristics; full channel 3D SONOS memories; laser thermal anneal treatment; lower channel conduction; memory window; performance-variability trade-off analysis; Annealing; Controllability; Electric variables; Junctions; Performance evaluation; Silicon; Statistical distributions; 3-D NAND; 3-D SONOS; BiCS Macaroni; Macaroni Channel Thickness;

fLanguage

English

Publisher

ieee

Conference_Titel

Memory Workshop (IMW), 2014 IEEE 6th International

Conference_Location

Taipei

Print_ISBN

978-1-4799-3594-9

Type

conf

DOI

10.1109/IMW.2014.6849381

Filename

6849381