• DocumentCode
    1727066
  • Title

    Microscale microsecond calorimetric sensing

  • Author

    Cavicchi, R.E. ; Thomas, O.C. ; Ross, D.J. ; Montgomery, C.B. ; Kreider, K.G. ; Tarlov, M.J.

  • Author_Institution
    Chem. Sci. & Technol. Lab., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
  • Volume
    2
  • fYear
    2003
  • Firstpage
    1168
  • Abstract
    Simple platinum metal lines are used for fast calorimetric measurements through the use of microsecond voltage pulses and measurement of the transient resistance changes of the metal line. When the metal line is immersed in water, microsecond voltage pulses may be used to superheat water and initiate microboiling on the heater. The nucleation of bubbles in superheated water produces an inflection point in the resistance-time transient that is shown to be sensitive to the presence of dilute species in the water and to the surface treatment of the metal line. We demonstrate effects of surfactant on the nucleation of bubbles in water in a microchannel. The effect of surface treatment is compared using hydrophobic and hydrophilic self-assembled monolayers formed on a thin gold plated coating on the Pt heater. Hydrophobic surfaces show a lower nucleation temperature. Selective coatings that change hydrophobicity in the presence of an analyte have potential for a new sensing approach. A final application is a humidity sensor, which uses fast voltage pulses to detect the calorimetric vaporization of water for dewpoint hygrometry.
  • Keywords
    boiling; bubbles; calorimetry; chemical sensors; gold; heat transfer; humidity sensors; microfluidics; nucleation; platinum; surface treatment; surfactants; thermal resistance measurement; Pt-Au; Si; bubbles; calorimetric vaporization; dewpoint hygrometry; dilute species; fast calorimetric measurements; humidity sensor; hydrophobic surfaces; hydrophobicity; inflection point; initiate microboiling; metal line; microchannel; microscale microsecond calorimetric sensing; microsecond voltage pulses; nucleation; platinum metal lines; resistance-time transient; superheat water; surface treatment; surfactant; thin gold plated coating; Coatings; Electrical resistance measurement; Gold; Heat treatment; Microchannel; Platinum; Pulse measurements; Surface treatment; Voltage measurement; Water heating;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
  • Conference_Location
    Boston, MA, USA
  • Print_ISBN
    0-7803-7731-1
  • Type

    conf

  • DOI
    10.1109/SENSOR.2003.1216979
  • Filename
    1216979