Title :
CAD For Microelectromechanical Systems
Author :
Senturia, Stephen D.
Author_Institution :
Microsystems Technology Laboratories, Department of Electrical Engineering and Computer Science Massachusetts Institute of Technology
Keywords :
Circuit simulation; Circuit testing; Computational modeling; Context modeling; Microelectromechanical systems; Micromechanical devices; Numerical simulation; Process design; Solid modeling; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.721697
