Title :
Internal current probing of integrated circuits using magnetic force microscopy
Author :
Campbell, Ann N. ; Cole, Edward I., Jr. ; Dodd, Bruce A. ; Anderson, Richard E.
Author_Institution :
Sandia Nat. Lab., Albuquerque, NM, USA
Abstract :
A model for the magnetic force microscopy (MFM) imaging of IC currents is presented. MFM signal generation is described and the ability to analyze current direction and magnitude with a sensitivity of approximately 1 mA DC and approximately 1 mu A AC is demonstrated. Experimental results are a significant improvement over the 100 mA AC resolution previously reported using an electron beam to detect IC currents.<>
Keywords :
electric current measurement; integrated circuit testing; magnetic force microscopy; monolithic integrated circuits; probes; IC currents; MFM signal generation; current direction; internal current probing; magnetic force microscopy; sensitivity; AC generators; DC generators; Electron beams; Integrated circuit modeling; Magnetic analysis; Magnetic force microscopy; Magnetic forces; Signal analysis; Signal generators; Signal resolution;
Conference_Titel :
Reliability Physics Symposium, 1993. 31st Annual Proceedings., International
Conference_Location :
Atlanta, GA, USA
Print_ISBN :
0-7803-0782-8
DOI :
10.1109/RELPHY.1993.283328
