Title :
Improved electromagnetic displacement transducer with large force for implantable middle ear hearing aid
Author :
Ki-Chan Lee ; Sekwang Park ; Eun Sok Kim
Author_Institution :
Dept. of EE-Electrophys., Southern California Univ., Los Angeles, CA, USA
Abstract :
This paper describes an improved electromagnetic displacement transducer for implantable middle ear hearing aid (IMEHA) and its in vivo test results in an ear of a dog. The new elastic body of the transducer is fabricated with silicon DRIE (Deep Reactive Ion Etching), and has a high aspect ratio, thus making the whole transducer volume 20% smaller. And the new design of the elastic body increase the energy transfer rate by 30% through reducing the unbalanced air gap of the electromagnetic driving part. In vivo experimental result shows the Auditory Brain Response (ABR) waveforms as a function of the sound pressure levels between 0 to 100 dB SPL.
Keywords :
biomedical transducers; finite element analysis; hearing aids; micromechanical devices; polymer films; sputter etching; auditory brain response waveforms; deep reactive ion etching; dog ear; elastic body; electromagnetic displacement transducer; electromagnetic driving part; energy transfer rate; implantable middle ear hearing aid; silicon deep RIE; sound pressure levels; unbalanced air gap; vivo test; Acoustic transducers; Auditory system; Coils; Ear; Electromagnetic forces; Energy exchange; In vivo; Polyimides; Testing; Vibrations;
Conference_Titel :
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7731-1
DOI :
10.1109/SENSOR.2003.1216991
