• DocumentCode
    1727795
  • Title

    Lateral Implanted RESURF GaN MOSFETs with BV up to 2.5 kV

  • Author

    Huang, W. ; Chow, T.P. ; Niiyama, Y. ; Nomura, T. ; Yoshida, S.

  • Author_Institution
    Center for Integrated Electron., Rensselaer Polytech. Inst., Troy, NY
  • fYear
    2008
  • Firstpage
    291
  • Lastpage
    294
  • Abstract
    We report on the demonstration of enhancement- mode n-channel lateral implanted GaN high-voltage MOSFET with breakdown voltage up to 2.5 kV or specific on-resistance as low as 30 mOmegaldrcm2. With proper RESURF dose, drain current up to 0.1 A and breakdown voltage up to 1570 V is realized on the same device. The reliability lifetime defined by the failure criteria of DeltaIp/Ip=20% was determined to be over 11 years at 250degC.
  • Keywords
    MOSFET; electric breakdown; RESURF MOSFET; breakdown voltage; n-channel lateral implanted MOSFET; Doping; Epitaxial layers; Gallium nitride; Implants; MOSFETs; Medical simulation; Silicon on insulator technology; Substrates; Thermal conductivity; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Power Semiconductor Devices and IC's, 2008. ISPSD '08. 20th International Symposium on
  • Conference_Location
    Orlando, FL
  • Print_ISBN
    978-1-4244-1532-8
  • Electronic_ISBN
    978-1-4244-1533-5
  • Type

    conf

  • DOI
    10.1109/ISPSD.2008.4538956
  • Filename
    4538956