• DocumentCode
    1727977
  • Title

    An "all-p-type" termination structure for silicon microstrip detectors

  • Author

    Betta, Gian-Franco Dalla ; Boscardin, Maurizio ; Bosisio, Luciano ; Dittongo, Selenia ; Gregori, Paolo ; Rachevskaia, Irina ; Verzellesi, Giovanni ; Zorzi, Nicola

  • Author_Institution
    ITC-IRST, Trento, Italy
  • Volume
    2
  • fYear
    2001
  • Firstpage
    906
  • Abstract
    A novel termination structure for silicon microstrip detectors is proposed, featuring all-p-type multiguards and scribe-line implant, as well as inward metal field-plates providing almost complete coverage of the passivation-oxide external surface. The structure is intended for detector long-term stability improvement and fabrication-process simplification. Proper design of the multiguard layout enables a very stable behavior at relatively high bias voltages to be achieved.
  • Keywords
    silicon radiation detectors; Si; Si microstrip detectors; all-p-type multiguards; all-p-type termination structure; detector long-term stability improvement; fabrication-process simplification; inward metal field-plates; passivation-oxide external surface; scribe-line implant; Humidity; Implants; Leakage current; Microstrip; Silicon radiation detectors; Stability; Surface contamination; Telephony; Temperature; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nuclear Science Symposium Conference Record, 2001 IEEE
  • ISSN
    1082-3654
  • Print_ISBN
    0-7803-7324-3
  • Type

    conf

  • DOI
    10.1109/NSSMIC.2001.1009702
  • Filename
    1009702