A novel micro-gas sensor using laterally grown carbon nanotubes

Author

Yoon-Taek Jang ; Chang-Hoon Choi ; Seung-Il Moon ; Jin-Ho Ahn ; Yun-Hi Lee ; Byeong-Kwon Ju

Author_Institution

Microsyst. Res. Center, Korea Inst. of Sci. & Technol., Seoul, South Korea

Volume

2

fYear

2003

Firstpage

1363

Abstract

We experimentally present the multiwalled carbon (MWNT) based gas sensor by a direct nano-wiring between Nb electrodes. Upon exposure MWNT to NH/sub 3/, the electrical resistance of the MWNTs is found to increase. The increase of temperature and gas concentration actually reduces the response time and increases the sensitivity to introduction of gas, respectively. Our results show a promising technique for forming CNT bridges between electrodes for chemical gas sensor at room temperature.

Keywords

ammonia; carbon nanotubes; electrical resistivity; electrodes; gas sensors; microsensors; nanowires; niobium; sensitivity; 293 to 298 K; C-Nb; CNT bridges; MWNT gas sensor; NH/sub 3/; Nb electrodes; chemical gas sensor; direct nanowiring; electrical resistance; gas concentration; laterally grown carbon nanotubes; micro-gas sensor; multiwalled carbon based gas sensor; room temperature; sensitivity; Carbon nanotubes; Chemical sensors; Chemical vapor deposition; Electric resistance; Electrodes; Gas detectors; Gases; Niobium; Scanning electron microscopy; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003

Conference_Location

Boston, MA, USA

Print_ISBN

0-7803-7731-1

Type

conf

DOI

10.1109/SENSOR.2003.1217027

Filename

1217027