DocumentCode
1728522
Title
Comparison of the electromigration behaviors between micro-bumps and C4 solder bumps
Author
Wei, C.C. ; Yu, C.H. ; Tung, C.H. ; Huang, R.Y. ; Hsieh, C.C. ; Chiu, C.C. ; Hsiao, H.Y. ; Chang, Y.W. ; Lin, C.K. ; Liang, Y.C. ; Chen, C. ; Yeh, T.C. ; Lin, Larry C. ; Yu, Doug C H
Author_Institution
Taiwan Semicond. Manuf. Co., Ltd., Hsinchu, Taiwan
fYear
2011
Firstpage
706
Lastpage
710
Abstract
As flip chip packages continue to migrate to Pb-free solder and micro-bumping (μbump) for 3D IC stacking, achieving high reliability with reduced dimension and concurrent increase in current density has become one of the major challenges for microelectronic packaging systems. In this study, the electromigration (EM) performance of the nominal C4 and μbump is compared. During EM tests, the resistance increase in μbumps is mainly due to intermetallic compound (IMC) growth, in contrast to the void formation and UBM/ IMC dissolution in C4 bumps. Early EM failures which were frequently observed in C4 bumps were mostly eliminated in the μ bump structures. Stress modeling was correlated with experimental observations. A proper design of the bump schemes can effectively distribute the current more uniformly, thus reducing the current crowding and local joule heating effects. Moreover, Sn grain orientation was found to critically affect the EM performance of both the μbump and the C4 bump joints.
Keywords
electromigration; flip-chip devices; integrated circuit packaging; integrated circuit reliability; solders; three-dimensional integrated circuits; 3D IC stacking; C4 solder bumps; electromigration behaviors; flip chip packages; intermetallic compound; lead-free solder; microbumping; microelectronic packaging; reliability; stress modeling; Copper; Electromigration; Joints; Nickel; Resistance; Substrates; Tin;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference (ECTC), 2011 IEEE 61st
Conference_Location
Lake Buena Vista, FL
ISSN
0569-5503
Print_ISBN
978-1-61284-497-8
Electronic_ISBN
0569-5503
Type
conf
DOI
10.1109/ECTC.2011.5898590
Filename
5898590
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