Measuring the optical and electromechanical properties of MEMS mirrors

We present a new measurement system that can determine the optical and electromechanical characteristics of MEMS mirrors. The angular measurement range is +/-5/spl deg/ in x direction and +/-4/spl deg/ in y direction with a resolution of 0.002/spl deg/. The system insertion loss and stability have been measured up to 10 hours with an averaging time of 100 ms. A maximum insertion loss of 75 dB can be measured. The measurement results of static voltage vs. angle response, long-term stability, package insertion loss and polarization dependent loss are presented. The static response data are further compared with modeling results. The average error between measured and simulated angle at a given voltage is less than 3%. Integrated with a closed-loop nonlinear controller, the system can also be used to measure the mirror tilt angle as a feedback sensing signal for precise angular positioning controls.