Thermal based angle fixing for micromirrors

This paper presents an angle fixing method used for micromirrors in the manufacturing misalignment adjustment system, such as laser-to-fiber coupling module. Micromirror devices with angle fixing by thermal fusion are first demonstrated. The experimental results of micromirrors with thermal based angle fixing are investigated and addressed. Three different angles are fixed with a maximum 0.10/spl deg/ angle change after the angle fixing. Finite element models with accurate material properties are developed to simulate the process. Guided by the model, the tilting angle shift can be reduced to 0.07/spl deg/ by changing microbridge and plate configurations.