A novel fabrication method of the micro cube beam-splitter with optical surface roughness

Author

Hung, Kuo-Yung ; Chen, Ying-Chuan ; Huang, Shih-Hao ; Chuang, Yun-Ju

Author_Institution

Inst. of Mech. & Electr. Eng., Ming Chi Univ. of Technol., Taishan, Taiwan

fYear

2010

Firstpage

141

Lastpage

142

Abstract

This paper successfully used inclined exposure technology to fabricate 50/50 3D micro cube beam splitter with 45° optical grade surface (~1.4 mm thick). This paper tests the effect of solvent loss percentage of the polymer material (optimum surface roughness: 85.45% solvent remove) on the surface roughness of inclined surfaces. The smallest surface roughness achieved in the experiments using SU-8 material with a thickness of 1.4 mm was less than 70 nm (400μm × 400μm area). This type of micro-mirror can be used as a key component in Michelson Interferometer, bio detection systems, data storage system and linear encoder.

Keywords

micromirrors; optical beam splitters; optical fabrication; optical losses; surface roughness; Michelson Interferometer; SU-8 material; bio detection systems; data storage; fabrication method; linear encoder; micro-mirror; microcube beam-splitter; optical surface roughness; polymer material; Biomedical optical imaging; Optical device fabrication; Optical interferometry; Optical polarization; Optical surface waves; Rough surfaces; Surface roughness;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Conference_Location

Sapporo

Print_ISBN

978-1-4244-8926-8

Electronic_ISBN

978-1-4244-8925-1

Type

conf

DOI

10.1109/OMEMS.2010.5672145

Filename

5672145