Title :
Compliant scanning micromirror actuated with a displacement amplification mechanism
Author :
Chen, Tzung-Ming ; Schneider, Florian ; Wallrabe, Ulrike
Author_Institution :
Univ. of Freiburg, Freiburg, Germany
Abstract :
We present the performance of a piezo-actuated compliant micromirror made of single crystal silicon, which is assembled with a compliant displacement amplification mechanism made of copper. Both of those two parts are purely based on the elasticity and deformation of thin beams. The measurement results reveal that our optical device achieves the specified function as a linear optical scanner, and that the kinetic motion and out-of-plane bending are under control.
Keywords :
deformation; elasticity; elemental semiconductors; micromirrors; optical scanners; silicon; compliant scanning micromirror; deformation; displacement amplification; elasticity; linear optical scanner; single crystal silicon; thin beams; Actuators; Copper; Measurement by laser beam; Micromirrors; Optical device fabrication; Silicon;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672150
