Title :
Fabrication and evaluation of piezoelectric drive type 2-axis tilt control device using epitaxial PZT thin film
Author :
Ozaki, Katsuya ; Akai, Daisuke ; Sawada, Kazuaki ; Ishida, Makoto
Author_Institution :
Toyohashi Univ. of Technol., Toyohashi, Japan
Abstract :
Piezoelectric drive type 2-axis tilt control device using epitaxial Pb(Zr0.52, Ti0.48)O3 (PZT) thin film on epitaxial γ-Al2O3/Si substrate have been fabricated. A 500 nm-thick epitaxial PZT(111) thin film was sol-gel deposited on epitaxial SrRuO3(111)/Pt(111)/ γ-Al2O3(111)/Si(1 11) substrates, and hollow structure under actuate area was formed by XeF2 gas etching. The fabricated device showed polarization-electric field (P-E) hysteresis loop of piezoelectric PZT thin film and the deflection. Therefore, the realization of piezoelectric drive type deformable mirrors (DMs) using epitaxial PZT thin film can be expected.
Keywords :
dielectric hysteresis; epitaxial layers; etching; lead compounds; micromirrors; optical fabrication; piezoelectric devices; sol-gel processing; Al2O3-Si; PZT; deformable mirrors; epitaxial PZT thin film; gas etching; piezoelectric drive type 2-axis tilt control; polarization-electric field hysteresis; sol-gel deposition; Electrodes; Epitaxial growth; Etching; Fabrication; Hysteresis; Silicon; Substrates;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672153
