Title :
Torsional mirror driven by a cantilever beam integrated with 1×10 individually biased PZT array actuator for VOA application
Author :
Koh, Kah How ; Kobayashi, Takeshi ; Lee, Chengkuo
Author_Institution :
Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore
Abstract :
A gold coated silicon mirror (5mm × 5mm) actuated by 1×10 piezoelectric Pb(Zr, Ti)O3 (PZT) array actuator integrated on a cantilever beam has been demonstrated for variable optical attenuator (VOA) application. Torsional attenuation based on the difference in the dc biasing voltage applied to the 1×10 PZT array actuator was investigated. The dynamic attenuation range of 40dB at 1.8V DC bias is observed in the attenuation curve.
Keywords :
beams (structures); cantilevers; gold; micromirrors; optical arrays; optical attenuators; piezoelectric actuators; silicon; PZT; PZT array actuator; Si-Au; VOA; cantilever beam; silicon mirror; torsional mirror; variable optical attenuator; voltage 1.8 V; Actuators; Attenuation; Micromechanical devices; Mirrors; Optical attenuators; Silicon; Voltage measurement;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672154
