Title :
A mixed-signal analysis for tilted MEMS torsion mirror devices
Author :
Maruyama, Satoshi ; Higo, Akio ; Nakada, M. ; Takahashi, K. ; Takahashi, T. ; Mita, M. ; Fujita, Hiroyuki ; Nakano, Yoshiaki ; Toshiyoshi, Hiroshi
Author_Institution :
Res. Center for Adv. Sci. & Technol., Univ. of Tokyo, Tokyo, Japan
Abstract :
We have already proposed a simulation model for a 90-deg-tilted MEMS mirror, but in some reasons, numerical simulation methods for several angle counter electrode devices are not established. In order to solve these problems, we propose a cascade drive voltage signal technique and demonstrate a 51.5 deg tilted angle counter electrode and assure the effectiveness of the equivalence circuit.
Keywords :
electrodes; equivalent circuits; micro-optomechanical devices; micromirrors; torsion; angle counter electrode devices; cascade drive voltage signal technique; equivalence circuit; mixed-signal analysis; tilted MEMS torsion mirror devices; Analytical models; Electrodes; Integrated circuit modeling; Micromechanical devices; Mirrors; Numerical models; Radiation detectors; equivalent circuit model; mixed-signal analysis; simulation;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672161
