MEMS-actuated waveguide phase modulators

Author

Chang, Chun-Che ; Chiu, Wei-Chao ; Wu, Jiun-Ming ; Lee, Ming-Chang M. ; Shieh, Jia-Min

Author_Institution

Inst. of Photonics Technol., Nat. Tsing Hua Univ., Hsinchu, Taiwan

fYear

2010

Firstpage

99

Lastpage

100

Abstract

An optical phase modulator for integrated optics was proposed by monolithic integration of deformable silicon photonic wires and MEMS actuators. Via applying voltage, the silicon wire is deformed and the wire length is extended, resulting in change of optical phase. A phase shift of 0.18 π is achieved at a bias of 35 V for a 150 μm wire according to numerical simulation. By cascading many of the MEMS-actuated wires, a π-phase shift can be realized at very low operation voltage. Based on this idea, a MEMS-actuated Mach-Zehnder interferometer was demonstrated.

Keywords

Mach-Zehnder interferometers; actuators; integrated optics; micro-optomechanical devices; optical modulation; optical waveguides; phase modulation; silicon; MEMS actuators; Mach-Zehnder interferometer; Si; deformable silicon photonic wires; integrated optics; optical phase modulator; phase shift; waveguide phase modulators; Optical attenuators; Optical device fabrication; Optical interferometry; Optical modulation; Optical waveguides; Silicon; Wires;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Conference_Location

Sapporo

Print_ISBN

978-1-4244-8926-8

Electronic_ISBN

978-1-4244-8925-1

Type

conf

DOI

10.1109/OMEMS.2010.5672164

Filename

5672164