Title :
MEMS-actuated waveguide phase modulators
Author :
Chang, Chun-Che ; Chiu, Wei-Chao ; Wu, Jiun-Ming ; Lee, Ming-Chang M. ; Shieh, Jia-Min
Author_Institution :
Inst. of Photonics Technol., Nat. Tsing Hua Univ., Hsinchu, Taiwan
Abstract :
An optical phase modulator for integrated optics was proposed by monolithic integration of deformable silicon photonic wires and MEMS actuators. Via applying voltage, the silicon wire is deformed and the wire length is extended, resulting in change of optical phase. A phase shift of 0.18 π is achieved at a bias of 35 V for a 150 μm wire according to numerical simulation. By cascading many of the MEMS-actuated wires, a π-phase shift can be realized at very low operation voltage. Based on this idea, a MEMS-actuated Mach-Zehnder interferometer was demonstrated.
Keywords :
Mach-Zehnder interferometers; actuators; integrated optics; micro-optomechanical devices; optical modulation; optical waveguides; phase modulation; silicon; MEMS actuators; Mach-Zehnder interferometer; Si; deformable silicon photonic wires; integrated optics; optical phase modulator; phase shift; waveguide phase modulators; Optical attenuators; Optical device fabrication; Optical interferometry; Optical modulation; Optical waveguides; Silicon; Wires;
Conference_Titel :
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-8926-8
Electronic_ISBN :
978-1-4244-8925-1
DOI :
10.1109/OMEMS.2010.5672164
