One-dimensional continuum modeling of chlorine radio-frequency discharges

Summary form only given, as follows. Theoretical predictions of a one-dimensional model of chlorine radio-frequency low discharge at low pressure are presented. The model consists of continuity equations for electrons, positive and negative ions, and of the electron energy conservation equation, coupled self-consistently with Poisson´s equation. The effects of the interelectrode distance, of the rf voltage amplitude and of the neutral gas pressure are investigated. The existence of peaks of electron temperature contributing to the level of electron density is shown to be controlled by the peak rf voltage while the pressure mainly influences the level of electron energy at the sheath-bulk interface and the sheath thickness.